Support automatic feeding of wafer or Frame, compatible with 4-8 inch wafer or Frame
A high-resolution optical system, with a good imaging effect
Multi-channel light combined detection, and custom lighting methods for different defects
Defined defect types, create a component library, classify and mark defects, and flexibly arrange a detection algorithm by the user
Cope with complex defect scenes in combination with an AI algorithm detection model
Automatic film expansion and dicing lane detection
Search and arrangement, suitable for irregular deformation caused by film expansion
Distributed computing system and high-speed data transmission system, providing super-high computing power for detection
Automatically generate a defect distribution MAP, which can be automatically combined with MAPPING data of the probe station
SPC function, chart statistics, and result tracing, etc. based on database query