AS-20
Full-automatic wafer optical microscopy inspection machine
Suitable for wafer defect detection before/after dicing, with high motion accuracy, high detection accuracy, and high operating computing power
AS-20
Full-automatic wafer optical microscopy inspection machine
Suitable for cosmetic defect detection of wafer/frame. Equipped with an advanced optical system, equipped with multi-channel light combination inspection, combined with AI algorithm inspection model, it can accurately identify common defects on the wafer surface. The distributed computing system provides ultra-high computing power for detection.
