GK-150
Full-automatic exposure machine
It can be customized according to the needs of diode chip manufacturers to meet the first, second and third exposures of 4, 5 and 6-inch Wafer
GK-150
Full-automatic exposure machine
It can be customized according to the process design requirements of diode chip manufacturers to meet the process processing needs of 4-, 5-, and 6-inch wafers for one, two, and three lithography on the same machine. Batch automation design, equipped with four input and output magazines; The double-station parallel meets the simultaneous operation of exposure and alignment.
