GK-150
GK-150
Full-automatic exposure machine
Fully automatic design, it can place 4 input magazines and 4 output magazines at one time
Double-station design, to meet the exposure and alignment of the film at the same time
The table is equipped with an adaptive leveling function
It can accurately control the bonding pressure between the mask and the chip
Automatically and quickly complete the coarse alignment of the chip: the chip is aligned, the center of the chip is positioned, and the chip is trimmed
Automatic alignment and positioning of wafers
Multi-template matching to solve the problem of the same product but large color difference
Accuracy of alignment is checked before exposure to ensure reliability
Equipped with a temporary storage box for abnormal pieces to ensure the continuity of equipment operation
Model Description

It can be customized according to the process design requirements of diode chip manufacturers to meet the process processing needs of 4-, 5-, and 6-inch wafers for one, two, and three lithography on the same machine. Batch automation design, equipped with four input and output magazines; The double-station parallel meets the simultaneous operation of exposure and alignment.

应用领域
晶圆片接触式曝光
产品特点
全自动芯片曝光
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